| Product name | Trimethylsilylmethanesulfonate |
| Structural Formula |  |
| Molecular Formula | C4H12O3SSi |
| Molecular Weight | 168.2868 |
| CAS No. | 10090-05-8 |
| Packing |
| Properties | |
| Appearance | Colorless liquid |
| Boiling range °C（25 mmHg） | 103.0-104.0 |
| Quality Specifications | |
| Purity % | ≥97.0 |
| Moisture % | ≤0.5 |